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Axcelis Technologies INC

108 Cherry Hill Dr, Beverly, MA 01915

ACTIVELAST SEEN IN FEDERAL DATA AUG 2026 · 3 SOURCES

Operating signal within 12 months from two or more independent sources.

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Homepage of Axcelis Technologies INC
Their homepage, crawled JUL 2026

What they make

Semiconductor Machinery Manufacturing333242

Axcelis designs and manufactures ion implanters, specifically the Purion platform and related products in high current, medium energy, high energy, and mid current variants. The company serves the semiconductor industry, including applications in advanced logic, image sensors, mature process technologies, memory (DRAM and NAND), and power devices.

SUMMARIZED FROM THE COMPANY’S OWN WEBSITE

Products

Made or handled here · 5
gsd ovation · medium energy · purion h high current ion implantation · purion ion implantation equipment · purion m mid current ion implantation
Where these came from
5 from the company’s own website · Company website
url-slug on https://www.axcelis.com/products/gsd-ovation/

Where it is

42.57500, -70.90723 · CENSUS TIGER
COUNTY
METRO AREA
ON GOOGLE MAPS

Other plants nearby

FacilityCityIndustryStatusDistance
108 Cherry Hill DriveBeverlySemiconductor Machinery Manufacturing
333242
LIKELY ACTIVE0.2 KM
Emd Millipore CORP - Bioscience DivisionDanversIndustrial Machinery Manufacturing
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UNVERIFIED0.7 KM
105 Sam FonzoBevelrySemiconductor Machinery Manufacturing
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LIKELY ACTIVE1.0 KM
Emd Millipore CorporationDanversAll Other Miscellaneous Fabricated Metal Product Manufacturing
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Axcelis Logistics CenterBeverlySemiconductor Machinery Manufacturing
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UNVERIFIED1.3 KM

Every listed plant in Essex County

Also at this address

No other federal record shares this street address.

WHERE THIS RECORD COMES FROM — 3 FEDERAL SOURCES, 8 FIELDS

Every fact on this page traces to a public federal filing. The table below names which register holds this facility, whether that register proves the plant operates or only that it exists, and when each of them last saw it.

EPA cross-references this facility in AIR, AIRS/AFS, BR, EIS, ICIS, MA-EPICS, NPDES, RCRAINFO, TRIS, TSCA · EPA site type STATIONARY.

SourceEvidenceFirst seenLast seen
COMPANY SITEOPERATINGJUL 2026AUG 2026
SAM GOVOPERATINGJUN 2026JUN 2026
EPA FRSEXISTENCEMAR 2014JUN 2017
FIELD BY FIELD — WHICH SOURCE SUPPLIED WHAT
FIELDSOURCESIGNAL
ADDRESS LINE1EPA FRSJUL 2026
ADDRESS LINE1SAM GOVJUN 2026
CAGE CODESAM GOVJUN 2026
CITYEPA FRSJUL 2026
CITYSAM GOVJUN 2026
GEOMEPA FRSJUL 2026
NAMEEPA FRSJUL 2026
NAMESAM GOVJUN 2026
REGISTRATION EXPIRATIONSAM GOVJUN 2026
STATEEPA FRSJUL 2026
STATESAM GOVJUN 2026
WEBSITESAM GOVJUN 2026

Status is computed from independent sources; nothing here is self-reported unless marked Claimed.

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