Operating signal within 12 months from two or more independent sources.
What they make
Semiconductor Machinery Manufacturing333242ULVAC Technologies, Inc. manufactures vacuum pumps, including dry pumps, rotary piston pumps, rotary vane pumps, booster pumps, and oil diffusion pumps, along with film measurement equipment, gauges and sensors, and leak detection instruments. The company also produces systems for chemical vapor deposition, vacuum furnaces, etching, evaporation, ion implantation, plasma ashing, and physical vapor deposition. ULVAC serves the semiconductor, memory, logic, energy, industrial, MEMS, LED, automotive, solar, and life sciences markets, and provides repair services, foundry services, and specialty materials including targets.
SUMMARIZED FROM THE COMPANY’S OWN WEBSITE
Products
Recorded against the company rather than this address. Federal award and drug records name the company, not the plant, so we cannot say which of its sites makes these.
Where these came from
Where it is
Other plants nearby
| Facility | City | Industry | Status | Distance |
|---|---|---|---|---|
| HQ Methuen | Methuen | Semiconductor Machinery Manufacturing 333242 | LIKELY ACTIVE | 0.0 KM |
| MKS Methuen | Methuen | Semiconductor Machinery Manufacturing 333242 | LIKELY ACTIVE | 0.7 KM |
| Mks INC. | Andover | Semiconductor Machinery Manufacturing 333242 | ACTIVE | 2.2 KM |
| MKS Shattuck Rd | Andover | Semiconductor Machinery Manufacturing 333242 | LIKELY ACTIVE | 2.5 KM |
| Mks Instruments INC | Andover | Semiconductor Machinery Manufacturing 333242 | UNVERIFIED | 2.5 KM |
Also at this address
No other federal record shares this street address.
WHERE THIS RECORD COMES FROM — 3 FEDERAL SOURCES, 8 FIELDS
Every fact on this page traces to a public federal filing. The table below names which register holds this facility, whether that register proves the plant operates or only that it exists, and when each of them last saw it.
EPA cross-references this facility in MA-EPICS, RCRAINFO · EPA site type STATIONARY.
| Source | Evidence | First seen | Last seen |
|---|---|---|---|
| COMPANY SITE | OPERATING | JUL 2026 | AUG 2026 |
| SAM GOV | OPERATING | JAN 2026 | JAN 2026 |
| EPA FRS | EXISTENCE | OCT 2014 | OCT 2014 |
FIELD BY FIELD — WHICH SOURCE SUPPLIED WHAT
| FIELD | SOURCE | SIGNAL |
|---|---|---|
| ADDRESS LINE1 | EPA FRS | JUL 2026 |
| ADDRESS LINE1 | SAM GOV | JAN 2026 |
| CAGE CODE | SAM GOV | JAN 2026 |
| CITY | EPA FRS | JUL 2026 |
| CITY | SAM GOV | JAN 2026 |
| GEOM | EPA FRS | JUL 2026 |
| NAME | EPA FRS | JUL 2026 |
| NAME | SAM GOV | JAN 2026 |
| REGISTRATION EXPIRATION | SAM GOV | JAN 2026 |
| STATE | EPA FRS | JUL 2026 |
| STATE | SAM GOV | JAN 2026 |
| WEBSITE | SAM GOV | JAN 2026 |
Status is computed from independent sources; nothing here is self-reported unless marked Claimed.